XYZ motion stacks for ultra-high vacuum and lowest temperatures (>10mK). The XYZ positioning stage assembly offers the displacement of a payload along all three spatial directions to realize complex positioning applications. Combining one Quano.Z with two Quano.X modules into a single unit, this assembly offers an extremely compact 3-axes motion stack with travel ranges of 3mm (horizontal x- and y-directions) and 2.5mm (vertical z-direction). Its footprint (15mm x 15mm) and height (24.5mm) make it the smallest XYZ-stack on the market!
Quano.XYZ
Fine positioning accuracy: <1nm
Material: Beryllium copper, sapphire, and PZT ceramics
Piezo material: PZT ceramics.
Operating temperature: 10mK to 390K
Fully UHV compatible and non-magneticAll our positioning stages are manufactured for applications under the most extreme conditions of ultra-high vacuum, high magnetic fields, and lowest temperatures much below (10 mK < T< 373 K). Of course, they work equally well under ambient conditions.
Critically, the unique structural design of our positioning stages enables unmatched thermal conductance across the positioning stage, as well as a significantly enhanced mechanical stability and robustness compared to other commercially available stages.
(link) Annotated 2D Drawing